Deformation Analysis of ArF Resist Pattern by using AFM
نویسندگان
چکیده
منابع مشابه
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در این پایان نامه نشان داده ایم که چگونه می توان مدل ریسک بیمه ای اسپیرر اندرسون را به کمک زنجیره های مارکوف تعریف کرد. سپس به کمک روش های آنالیز ماتریسی احتمال برشکستگی ، میزان مازاد در هنگام برشکستگی و میزان کسری بودجه در زمان وقوع برشکستگی را محاسبه کرده ایم. هدف ما در این پایان نامه بسیار محاسباتی و کاربردی تر از روش های است که در گذشته برای محاسبه این احتمال ارائه شده است. در ابتدا ما نشا...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2007
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.20.827